Grooving Methods |
Wet Etching
| Photomask required: | Yes |
| Width: | 50-100µm |
| Tolerance: | ± 1µm |
| Surface Roughness: | Ra = 0.1µm |
| Shape of Groove: | U shape |
| Other: | High transparency, complicated flow path layout available |
Machining
| Photomask required: | No |
| Width: | 100-300µm |
| Tolerance: | ± 5 µm |
| Surface Roughness: | Ra = 0.2µm |
| Shape of Groove: | Round, U shape, V shape |
| Other: | Fair transparency, only straight path layouts available |
Shot Blast
| Photomask required: | Yes |
| Width: | from 100m |
| Tolerance: | ±20µm |
| Surface Roughness: | Ra = 0.7µm |
| Shape of Groove: | U shape |
| Other: | Low cost, complicated flow path layouts available |
Dry Etching
No information is currently available.
Continue to Substrate & Material Info
Copyright NSG Precision Cells, Inc. 2005